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Investigation of Boron Delta-layers in Silicon Measured by Atom Probe Tomography (APT)
Klein, C, Mutas, S, Würfel, A, Zschech, EVolume:
15
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609093945
Date:
July, 2009
File:
PDF, 129 KB
2009