Performance of Low-voltage Electron Microscope with New...

Performance of Low-voltage Electron Microscope with New Aberration Correction System and Cold Field Emission Gun

Sasaki, T, Sawada, H, Nakamichi, T, Hosokawa, F, Omoto, K, Tomita, T, Kaneyama, T, Kondo, Y, Kimoto, K, Suenaga, K
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Volume:
15
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609094057
Date:
July, 2009
File:
PDF, 4.26 MB
2009
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