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LM-STEM Study of Dislocations in Thick Silicon
Tang, D, Rucki, A, Cerva, H, Schlossmacher, PVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609094100
Date:
July, 2009
File:
PDF, 3.84 MB
english, 2009