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A TEM Nanoanalytic Investigation of Pd/Ge Ohmic Contacts for the Miniaturization and Optimization of InGaAs nMOSFET Devices.
Longo, P, Jansen, W, Merckling, C, Penaud, J, Caymax, M, Thayne, IG, Craven, AJVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609094483
Date:
July, 2009
File:
PDF, 2.36 MB
english, 2009