Detection of Arsenic Dopant Atoms in Silicon Crystal by...

Microscopy and Microanalysis 2009 / 7 Vol. 15; Iss. S2

Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope

Oshima, Y, Hashimoto, Y, Sawada, H, Hashikawa, N, Asayama, K, Kondo, Y, Tanishiro, Y, Takayanagi, K
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Volume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609095233
Date:
July, 2009
File:
PDF, 727 KB
english, 2009
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