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The Hyperion™ Ion Probe for Next Generation FIB, SIMS and Nano-Ion, Implantation
Smith, N, Tesch, P, Martin, N, Boswell, RVolume:
15
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609095300
Date:
July, 2009
File:
PDF, 663 KB
2009