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A New and Fast Method for the Creation of 3D Micro and Nano Structures
Mulders, JJL, Faber, JSVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609095403
Date:
July, 2009
File:
PDF, 1.67 MB
english, 2009