Soft Electron Beam Lithography (Soft-eBL) Patterning of 0-...

Soft Electron Beam Lithography (Soft-eBL) Patterning of 0- and 1-D Nanostructures of Magnetic and Ferroelectric Oxides

Liu, B, Dravid, VP
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Volume:
15
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s143192760909655x
Date:
July, 2009
File:
PDF, 750 KB
2009
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