Precision Material Modification and Patterning with Helium...

Precision Material Modification and Patterning with Helium Ions

Bell, DC, Lemme, M, Marcus, CM
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Volume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609096706
Date:
July, 2009
File:
PDF, 568 KB
english, 2009
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