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In-Situ Observation and Characterization of Structural Evolution in a Phase-Change Memory Device by TEM-STM
Cha, D, Park, SY, Ahn, SJ, Horii, H, Kim, DK, Kim, YK, Park, SO, Jung, UI, Kim, MJ, Kim, JVolume:
15
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609097694
Date:
July, 2009
File:
PDF, 310 KB
2009