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Quantification of Interfacial Roughness of In2O3/ZrO2 Superlattice Films in 3D
Zhong, X, Kabius, B, Schreiber, D, Eastman, J, Fong, D, Petford-Long, AVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609098626
Date:
July, 2009
File:
PDF, 1.93 MB
english, 2009