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Automated Sample Preparation of Nanoscale Devices for FESEM
Cerchiara, RR, Fischione, PE, Boccabella, MF, Robins, ACVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609098651
Date:
July, 2009
File:
PDF, 2.16 MB
english, 2009