Superior Imaging Quality of Scanning Helium-Ion Microscopy:...

Superior Imaging Quality of Scanning Helium-Ion Microscopy: a Look at Beam-Sample Interactions,

Cohen-Tanugi, D, Yao, N
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Volume:
15
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609098687
Date:
July, 2009
File:
PDF, 302 KB
2009
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