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Electron Beam Induced Deposition and Etching: Fundamentals, Challenges and Nanotechnology–based Applications
Fowlkes, J, Smith, DA, Lassiter, MG, Rack, PDVolume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609099176
Date:
July, 2009
File:
PDF, 920 KB
english, 2009