Challenges and Opportunities for Focused Ion Beam...

Microscopy and Microanalysis 2009 / 7 Vol. 15; Iss. S2

Challenges and Opportunities for Focused Ion Beam Processing at the Nano-scale

Gierak, J, Schiedt, B, Lucot, D, Madouri, A, Bourhis, E, Patriarche, G, Ulysse, C, Lafosse, X, Auvray, L, Bruchhaus, L, Jede, R
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Volume:
15
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927609099474
Date:
July, 2009
File:
PDF, 1.29 MB
english, 2009
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