Surface Sensitive and Compositional SEM Imaging for High Accelerating Voltages in Focused Ion/Electron Beam Systems
Agemura, T, Nomaguchi, T, Onishi, TVolume:
16
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927610054942
Date:
July, 2010
File:
PDF, 703 KB
english, 2010