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Fabrication and Characterization of Ultra-High Aspect Ratio Features in Gold Using the Helium Ion Microscope
Smentkowski, VS, Potyrailo, R, Scipioni, L, Ferranti, DVolume:
16
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927610055261
Date:
July, 2010
File:
PDF, 3.82 MB
english, 2010