Automated XPS Analysis of Passivated Stainless Steel to the...

Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard

White, RG, Nunney, TS, Strohmeier, BR, Piasecki, JD, Lee, RJ
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Volume:
16
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927610057569
Date:
July, 2010
File:
PDF, 486 KB
english, 2010
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