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Atom-by-Atom Analysis of Rare-Earth Dopants implanted in Silicon
Couillard, M, Radtke, G, Knights, AP, Botton, GAVolume:
16
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927610060885
Date:
July, 2010
File:
PDF, 445 KB
english, 2010