Mitigating Focused Ion Beam Damage in Molybdenum...

Microscopy and Microanalysis 2010 / 7 Vol. 16; Iss. S2

Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing

Lowry, MB, Kiener, D, LeBlanc, MM, Chisholm, C, Florando, JN, Morris, JW, Minor, AM
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Volume:
16
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927610061957
Date:
July, 2010
File:
PDF, 998 KB
english, 2010
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