Strain Mapping on Semiconductor Device by Dark Field...

Microscopy and Microanalysis 2010 / 7 Vol. 16; Iss. S2

Strain Mapping on Semiconductor Device by Dark Field Electron Holography

Wang, YY, Li, J, Bruley, J, Domenicucci, A, Cooper, D, Jean-Luc, R
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Volume:
16
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927610063129
Date:
July, 2010
File:
PDF, 1.12 MB
english, 2010
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