Advanced Physical Failure Analysis Techniques Using 3D...

Microscopy and Microanalysis 2011 / 7 Vol. 17; Iss. S2

Advanced Physical Failure Analysis Techniques Using 3D Rotation Imaging from Plane-View TEM Sample

Kang, H-J, Gwak, J-G, Park, T-S, Back, T-S, Kim, H-J, Han, O
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Volume:
17
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927611004041
Date:
July, 2011
File:
PDF, 413 KB
english, 2011
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