Strain Measurement of Selective Epitaxial Growth (SEG) SiGe...

Microscopy and Microanalysis 2011 / 7 Vol. 17; Iss. S2

Strain Measurement of Selective Epitaxial Growth (SEG) SiGe Structure by the Nano Beam Diffraction (NBD) Method

Kim, S-W, Yoo, J-H, Koo, S-M, Ko, D-H
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Volume:
17
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927611006416
Date:
July, 2011
File:
PDF, 3.80 MB
english, 2011
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