Disassembling Glancing Angle Deposited Films for...

Microscopy and Microanalysis 2012 / 10 Vol. 18; Iss. 5

Disassembling Glancing Angle Deposited Films for High-Throughput, Single-Post Growth Scaling Measurements

Siewert, Joshua Morgan Arthur, LaForge, Joshua Michael, Taschuk, Michael Thomas, Brett, Michael Julian
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Volume:
18
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927612001080
Date:
October, 2012
File:
PDF, 546 KB
english, 2012
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