Gas-Mediated Electron Beam Induced Etching - From...

Microscopy and Microanalysis 2014 / 08 Vol. 20; Iss. S3

Gas-Mediated Electron Beam Induced Etching - From Fundamental Physics to Device Fabrication

Martin, A. A., Aharonovich, I., Toth, M.
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Volume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927614003547
Date:
August, 2014
File:
PDF, 1.08 MB
english, 2014
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