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Hybrid SEM/AFM System from Carl Zeiss Revolutionizes Analysis of Functional Micro- and Nanostructured Specimen
Anspach, Nils, Hitzel, Frank, Zhou, Fang, Eyhusen, SoerenVolume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927614006680
Date:
August, 2014
File:
PDF, 1010 KB
english, 2014