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Electron Channeling Contrast Imaging for Non-Destructive Analysis of Extended Defects in Semiconductor Thin Films and Device Structures
Katz, M.B., Twigg, M.E., Maximenko, S.I., Bassim, N.D., Mahadik, N.A., Jernigan, G.G., Canedy, C.L., Abell, J., Affouda, C.A.Volume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927614007041
Date:
August, 2014
File:
PDF, 1.77 MB
english, 2014