AFM Integrated with SEM/FIB for Complete 3D Metrology...

Microscopy and Microanalysis 2014 / 08 Vol. 20; Iss. S3

AFM Integrated with SEM/FIB for Complete 3D Metrology Measurements

Lewis, Aaron, Komissar, A., Ignatov, A., Fedoroyov, Oleg, Maayan, E., Yablon, Dalia
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927614007296
Date:
August, 2014
File:
PDF, 895 KB
english, 2014
Conversion to is in progress
Conversion to is failed