Concepts for an Annular Pole Piece Detector for the Simultaneous Measurement of X-Rays and Backscattered Electrons Inside a SEM
Liebel, A., Eckhardt, R., Bornschlegl, M., Bechteler, A., Niculae, A., Soltau, H.Volume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927614007326
Date:
August, 2014
File:
PDF, 1.33 MB
english, 2014