A New In-situ Broad Ion Beam, With Energy Range 1 – 500 eV

A New In-situ Broad Ion Beam, With Energy Range 1 – 500 eV

Mulders, J.J.L., Trompenaars, P.H.F, Bosch, E.G.T., Geurts, R.T.J.P
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Volume:
20
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927614007442
Date:
August, 2014
File:
PDF, 1.04 MB
english, 2014
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