Computer-Controlled In Situ Gas Reactions via a MEMS-based...

Computer-Controlled In Situ Gas Reactions via a MEMS-based Closed-Cell System

Allard, L. F., Bigelow, W. C., Wu, Z., Overbury, S. H., Unocic, K. A., Chi, M., Carpenter, W. B., Walden, F. S., Thomas, R. L., Gardiner, D. S., Jacobs, B. W., Nackashi, D. P., Damiano, J.
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Volume:
21
Language:
english
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927615001282
Date:
August, 2015
File:
PDF, 2.31 MB
english, 2015
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