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Atom-Probe-Tomographic Studies on Silicon-Based Semiconductor Devices
Inoue, Koji, Kambham, Ajay Kumar, Mangelinck, Dominique, Lawrence, Dan, Larson, David J.Volume:
20
Language:
english
Journal:
Microscopy Today
DOI:
10.1017/s1551929512000740
Date:
September, 2012
File:
PDF, 3.83 MB
english, 2012