Fabrication of MEMS Components Based on...

MRS Proceedings 2000 / 1 Vol. 657

Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties

Sumant, A. V., Auciello, O., Krauss, A. R., Gruen, D. M., Ersoy, D., Tucek, J., Jayatissa, A., Stach, E., Moldovan, N., Mancini, D., Busmann, H. G., Meyer, E. M.
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Volume:
657
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-657-EE5.33
Date:
January, 2000
File:
PDF, 331 KB
english, 2000
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