Direct Patterning of Ionic Polymers with E-Beam Lithography
Steinbach, Annina M., Jenisch, Stefan, Bakhtiarpour, Parisa, Amirkhani, Masoud, Strehle, SteffenVolume:
1
Year:
2016
Language:
english
Journal:
MRS Advances
DOI:
10.1557/adv.2016.66
File:
PDF, 595 KB
english, 2016