Cubic phase stabilization and improved dielectric properties of atomic-layer-deposited Er yHf1-yO x thin films
Jinesh, K.B., Lamy, Y., Tois, E., Forti, R., Kaiser, M., Bakker, F., Wondergem, H.J., Besling, W.F.A., Roozeboom, F.Volume:
25
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2010.0208
Date:
August, 2010
File:
PDF, 1.33 MB
english, 2010