Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides
Zhou, Lan, Suram, Santosh K., Becerra-Stasiewicz, Natalie, Mitrovic, Slobodan, Kan, Kevin, Jones, Ryan J.R., Gregoire, John M.Volume:
30
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2015.140
Date:
October, 2015
File:
PDF, 484 KB
english, 2015