Directed self-assembly lithography for half-pitch sub-15 nm...

MRS Proceedings 2015 Vol. 1750

Directed self-assembly lithography for half-pitch sub-15 nm pattern fabrication process

Sato, Hironobu, Seino, Yuriko, Kihara, Naoko, Kasahara, Yusuke, Kobayashi, Katsutoshi, Kodera, Katsuyoshi, Kanai, Hideki, Kawamonzen, Yoshiaki, Minegishi, Shinya, Miyagi, Ken, Tobana, Toshikatsu, Hira
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
1750
Year:
2015
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2015.342
File:
PDF, 1.41 MB
english, 2015
Conversion to is in progress
Conversion to is failed