A simulation study for defects in sub-15 nm line-space...

MRS Proceedings 2015 Vol. 1750

A simulation study for defects in sub-15 nm line-space using directed self-assembly

Kanai, Hideki, Kodera, Katsuyoshi, Seino, Yuriko, Sato, Hironobu, Kasahara, Yusuke, Kobayashi, Katsutoshi, Miyagi, Ken, Minegishi, Shinya, Kihara, Naoko, Kawamonzen, Yoshiaki, Fujiwara, Tomoharu, Hira
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Volume:
1750
Year:
2015
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2015.361
File:
PDF, 1010 KB
english, 2015
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