Magnetron-Sputtered Metal-Amorphous Silicon Interfaces

MRS Proceedings 1981 / 1 Vol. 10

Magnetron-Sputtered Metal-Amorphous Silicon Interfaces

Anderson, W. W., Crowley, J. L., Jonath, A. D., Macmillan, H. F., Opyd, W. G., Thornton, J. A.
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Volume:
10
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-10-311
Date:
January, 1981
File:
PDF, 363 KB
english, 1981
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