High Temperature Annealing of Simox Layers Physical...

MRS Proceedings 1988 / 1 Vol. 100

High Temperature Annealing of Simox Layers Physical Mechanisms of Oxygen Segregation

Jaussaud, C., Margail, J., Stoemenos, J., Bruel, M.
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Volume:
100
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-100-17
Date:
January, 1988
File:
PDF, 2.30 MB
english, 1988
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