The Promotion of Silicide Formation using a Scanned Silicon...

MRS Proceedings 1988 / 1 Vol. 100

The Promotion of Silicide Formation using a Scanned Silicon Ion Beam

Williams, E. J., Bithell, E. G., Boothroyd, C. B., Stobbs, W. M., Young, R. J., Cleaver, J. R. A.
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Volume:
100
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-100-287
Date:
January, 1988
File:
PDF, 2.88 MB
english, 1988
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