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Amorphous Phase Formation During Ion Mixing of Ti/Si Bilayers at Elevated Temperature
Maex, K., Keersmaecker, R. F. De, rossum, M. Van, Weg, W. F. Van DerVolume:
100
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-100-63
Date:
January, 1988
File:
PDF, 1.58 MB
english, 1988