Initial Stages of Silicon Growth on the (100) Surface of...

Initial Stages of Silicon Growth on the (100) Surface of Silicon By Localized Laser Cvd

Kotecki, David E., Herman, Irving P.
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Volume:
101
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-101-119
Date:
January, 1987
File:
PDF, 925 KB
english, 1987
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