The Role of Diatomic SiO in Dry Oxidation of Si

MRS Proceedings 1987 / 1 Vol. 105

The Role of Diatomic SiO in Dry Oxidation of Si

Raider, Stanley I., Walkup, Robert E.
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Volume:
105
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-105-145
Date:
January, 1987
File:
PDF, 884 KB
english, 1987
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