Submicron Roughness Determination at the Si-SiO2 Interface...

Submicron Roughness Determination at the Si-SiO2 Interface and Correlations to Prccessing Steps and Electronic Properties

Hahn, Peter O., Lampert, I., Schnegg, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
105
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-105-247
Date:
January, 1987
File:
PDF, 401 KB
english, 1987
Conversion to is in progress
Conversion to is failed