Study of SiO2 Formation by Plasma Treatment of SiO Thin Films
Perriere, J., Pelloie, B., Rochet, F., Fogarassy, E., Slaoui, A., Dufour, G., Roulet, H., Fromnt, M.Volume:
105
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-105-85
Date:
January, 1987
File:
PDF, 1.38 MB
english, 1987