Polysilicon Super Thin Film Transistor Technology
Noguchi, Takashi, Hayashi, Hisao, Ohshima, TakefumiVolume:
106
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-106-293
Date:
January, 1987
File:
PDF, 1.45 MB
english, 1987