Monitoring SIMOX Layer Properties and Implantation...

MRS Proceedings 1987 / 1 Vol. 107

Monitoring SIMOX Layer Properties and Implantation Temperature by Optical Measurements

Harbeke, Guenther, Steigmeier, E.F., Hemment, Peter L.F., Reeson, Karen J., Jastrzebski, Lubek
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Volume:
107
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-107-133
Date:
January, 1987
File:
PDF, 252 KB
english, 1987
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