Oxygen Ion Implantation into Germanium
Sjoreen, T.P., Ravindra, N.M., El-Ghor, M.K., Fathy, D.Volume:
107
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-107-137
Date:
January, 1987
File:
PDF, 648 KB
english, 1987