Influence of the SOI Surface Morphology on Crystal...

MRS Proceedings 1987 / 1 Vol. 107

Influence of the SOI Surface Morphology on Crystal Orientation and Device Characteristics

KUNIO, Takemitsu, OYAMA, Ken-Ichi, ENOMOTO, Tadayoshi
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Volume:
107
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-107-409
Date:
January, 1987
File:
PDF, 982 KB
english, 1987
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